Current developments and applications using multi-beam laser interference lithography for nanoscale structuring of materials

  1. Su, S.Z.
  2. Rodríguez, A.
  3. Olaizola, S.M.
  4. Peng, C.S.
  5. Tan, C.
  6. Verevkin, Y.K.
  7. Berthoud, T.
  8. Tisserand, S.
Actes de conférence:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

ISBN: 9780819467218

Année de publication: 2007

Volumen: 6593

Type: Communication dans un congrès

DOI: 10.1117/12.723620 GOOGLE SCHOLAR
La source de données: Scopus