Optimization of a three-electrode electrochemical etch-stop process
- Elizalde, J.G.
- Olaizola, S.
- Bistué, G.
- Castaño, E.
- García-Alonso, A.
- Gracia, F.J.
ISSN: 0924-4247
Year of publication: 1997
Volume: 62
Issue: 1-3
Pages: 668-671
Type: Article
ISSN: 0924-4247
Year of publication: 1997
Volume: 62
Issue: 1-3
Pages: 668-671
Type: Article