Mechanical and electrical properties Of SiO2 thin films r.f. sputtered on non-silicon substrates for mechanical sensors

  1. García-Alonso, A.
  2. Artázcoz, J.
  3. Castaño, E.
  4. Obieta, I.
  5. Gracia, F.J.
Journal:
Sensors and Actuators: A. Physical

ISSN: 0924-4247

Year of publication: 1993

Volume: 37-38

Issue: C

Pages: 57-60

Type: Article

DOI: 10.1016/0924-4247(93)80012-6 GOOGLE SCHOLAR
Data source: Scopus