Strain sensitivity and temperature influence on sputtered thin films for piezoresistive sensors
- García-Alonso, A.
- García, J.
- Castaño, E.
- Obieta, I.
- Gracia, F.J.
ISSN: 0924-4247
Année de publication: 1993
Volumen: 37-38
Número: C
Pages: 784-789
Type: Article