Interference lithography processes with high-power laser pulses

  1. Rodriguez, A.
  2. Ellman, M.
  3. Ayerdi, I.
  4. Perez, N.
  5. Olaizola, S.M.
  6. Zhangb, J.
  7. Ji, Z.
  8. Berthouc, T.
  9. Pengd, C.S.
  10. Verevkine, Y.K.
  11. Wang, Z.
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

Year of publication: 2009

Volume: 7201

Type: Conference paper

DOI: 10.1117/12.808834 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus