Interference lithography processes with high-power laser pulses

  1. Rodriguez, A.
  2. Ellman, M.
  3. Ayerdi, I.
  4. Perez, N.
  5. Olaizola, S.M.
  6. Zhangb, J.
  7. Ji, Z.
  8. Berthouc, T.
  9. Pengd, C.S.
  10. Verevkine, Y.K.
  11. Wang, Z.
Aktak:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

Argitalpen urtea: 2009

Alea: 7201

Mota: Biltzar ekarpena

DOI: 10.1117/12.808834 GOOGLE SCHOLAR

Garapen Iraunkorreko Helburuak

Datuen iturria: Scopus