System requirement analysis of laser interference nanolithography

  1. Wang, Z.
  2. Zhang, J.
  3. Peng, C.
  4. Tan, C.
  5. Ayerdi, I.
  6. Rodriguez, A.
  7. Verevkin, Y.K.
  8. Berthou, T.
  9. Tisserand, S.
  10. Olaizola, S.M.
Proceedings:
Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007

ISBN: 9781424408283

Year of publication: 2007

Pages: 434-439

Type: Conference paper

DOI: 10.1109/ICMA.2007.4303582 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus