System requirement analysis of laser interference nanolithography

  1. Wang, Z.
  2. Zhang, J.
  3. Peng, C.
  4. Tan, C.
  5. Ayerdi, I.
  6. Rodriguez, A.
  7. Verevkin, Y.K.
  8. Berthou, T.
  9. Tisserand, S.
  10. Olaizola, S.M.
Aktak:
Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007

ISBN: 9781424408283

Argitalpen urtea: 2007

Orrialdeak: 434-439

Mota: Biltzar ekarpena

DOI: 10.1109/ICMA.2007.4303582 GOOGLE SCHOLAR

Garapen Iraunkorreko Helburuak

Datuen iturria: Scopus