Quality inspection of nanoscale patterns produced by laser interference lithography using image analysis techniques

  1. Ji, Z.
  2. Zhang, J.
  3. Peng, C.
  4. Tan, C.
  5. Olaizola, S.M.
  6. Berthou, T.
  7. Tisserand, S.
  8. Verevkin, Y.K.
  9. Wang, Z.
Konferenzberichte:
2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009

ISBN: 9781424426935

Datum der Publikation: 2009

Seiten: 1835-1840

Art: Konferenz-Beitrag

DOI: 10.1109/ICMA.2009.5246458 GOOGLE SCHOLAR
Datenquelle: Scopus