Quality inspection of nanoscale patterns produced by laser interference lithography using image analysis techniques

  1. Ji, Z.
  2. Zhang, J.
  3. Peng, C.
  4. Tan, C.
  5. Olaizola, S.M.
  6. Berthou, T.
  7. Tisserand, S.
  8. Verevkin, Y.K.
  9. Wang, Z.
Aktak:
2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009

ISBN: 9781424426935

Argitalpen urtea: 2009

Orrialdeak: 1835-1840

Mota: Biltzar ekarpena

DOI: 10.1109/ICMA.2009.5246458 GOOGLE SCHOLAR
Datuen iturria: Scopus