Quality inspection of nanoscale patterns produced by laser interference lithography using image analysis techniques

  1. Ji, Z.
  2. Zhang, J.
  3. Peng, C.
  4. Tan, C.
  5. Olaizola, S.M.
  6. Berthou, T.
  7. Tisserand, S.
  8. Verevkin, Y.K.
  9. Wang, Z.
Proceedings:
2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009

ISBN: 9781424426935

Year of publication: 2009

Pages: 1835-1840

Type: Conference paper

DOI: 10.1109/ICMA.2009.5246458 GOOGLE SCHOLAR
Data source: Scopus