Threshold energy for sputtering and its dependence on angle of incidence

  1. Eckstein, W.
  2. Garciá-Rosales, C.
  3. Roth, J.
  4. László, J.
Journal:
Nuclear Inst. and Methods in Physics Research, B

ISSN: 0168-583X

Year of publication: 1993

Volume: 83

Issue: 1-2

Pages: 95-109

Type: Article

DOI: 10.1016/0168-583X(93)95913-P GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus