Mechanical Robustness of Patterned Structures and Failure Mechanisms

  1. Zschech, E.
  2. Elizalde, M.R.
Book:
More-than-Moore Devices and Integration for Semi Conductors

ISBN: 9783031216091

Year of publication: 2023

Pages: 157-190

Type: Book chapter

DOI: 10.1007/978-3-031-21610-7_5 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus