High-temperature polysilicon pressure microsensor

  1. Obieta, I.
  2. Castaño, E.
  3. Gracia, F.J.
Journal:
"Sensors and Actuators, A: Physical"

ISSN: 0924-4247

Year of publication: 1995

Volume: 46

Issue: 1-3

Pages: 161-165

Type: Article

DOI: 10.1016/0924-4247(94)00882-I GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus