Strain sensitivity and temperature influence on sputtered thin films for piezoresistive sensors

  1. García-Alonso, A.
  2. García, J.
  3. Castaño, E.
  4. Obieta, I.
  5. Gracia, F.J.
Journal:
Sensors and Actuators: A. Physical

ISSN: 0924-4247

Year of publication: 1993

Volume: 37-38

Issue: C

Pages: 784-789

Type: Article

DOI: 10.1016/0924-4247(93)80132-Z GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus