Publications in collaboration with researchers from Karlsruhe Institute of Technology (7)

2013

  1. Crack propagation and fracture in silicon wafers under thermal stress

    Journal of Applied Crystallography, Vol. 46, Núm. 4, pp. 849-855

  2. X-ray diffraction imaging for predictive metrology of crack propagation in 450-mm diameter silicon wafers

    Powder Diffraction

2011

  1. Dislocation dynamics and slip band formation in silicon: In-situ study by X-ray diffraction imaging

    Journal of Crystal Growth

  2. Real-time X-ray diffraction imaging for semiconductor wafer metrology and high temperature in situ experiments

    Physica Status Solidi (A) Applications and Materials Science, Vol. 208, Núm. 11, pp. 2499-2504

2010

  1. Dislocation generation related to micro-cracks in Si wafers: High temperature in situ study with white beam X-ray topography

    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 268, Núm. 3-4, pp. 399-402

  2. Dislocation sources and slip band nucleation from indents on silicon wafers

    Journal of Applied Crystallography, Vol. 43, Núm. 5 PART 1, pp. 1036-1039

  3. X-ray diffraction imaging of dislocation generation related to microcracks in Si wafers

    Powder Diffraction, Vol. 25, Núm. 2, pp. 99-103