Publications en collaboration avec des chercheurs de Centro de Estudios e Investigaciones Técnicas de Gipuzkoa (17)

2021

  1. Study of deposition parameters and growth kinetics of ZnO deposited by aerosol assisted chemical vapor deposition

    RSC Advances, Vol. 11, Núm. 30, pp. 18493-18499

2017

  1. Metallization and electrical characterization of platinum thin film microelectrodes on biocompatible polydimethylsiloxane substrates for neural implants

    Thin Solid Films, Vol. 636, pp. 438-445

2012

  1. Fabrication of sub-micrometric metallic hollow-core structures by laser interference lithography

    Applied Surface Science

2011

  1. Topological and electrical analysis of flexible platinum electrodes on biocompatible PDMS substrates

    IFMBE Proceedings

2009

  1. High-power laser interference lithography process on photoresist: Effect of laser fluence and polarisation

    Applied Surface Science, Vol. 255, Núm. 10, pp. 5537-5541

  2. Laser interference lithography for nanoscale structuring of materials: From laboratory to industry

    Microelectronic Engineering, Vol. 86, Núm. 4-6, pp. 937-940

2008

  1. Influence of silver as an additive on BaTiO3-CuO thin film for CO2 monitoring

    Sensors and Actuators, B: Chemical, Vol. 129, Núm. 1, pp. 386-390

2007

  1. System requirement analysis of laser interference nanolithography

    Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007

2006

  1. BaTiO3-CuO sputtered thin film for carbon dioxide detection

    Sensors and Actuators, B: Chemical, Vol. 118, Núm. 1-2, pp. 305-310

  2. SU8 protective layers in liquid operating SAWs

    Sensors and Actuators, B: Chemical, Vol. 118, Núm. 1-2, pp. 374-379

  3. Thermal behavior of freestanding microstructures fabricated by silicon frontside processing using porous silicon as sacrificial layer

    IEEE Sensors Journal, Vol. 6, Núm. 3, pp. 548-556

2005

  1. Ag/AgI quasi-reference microelectrodes

    2005 Spanish Conference on Electron Devices, Proceedings

  2. Thermal conductivity microsensor for determining the Methane Number of natural gas

    Sensors and Actuators, B: Chemical, Vol. 110, Núm. 2, pp. 181-189

  3. Thermal conductivity microsensor to measure the Methane Number of natural gas

    2005 Spanish Conference on Electron Devices, Proceedings

1997

  1. High-temperature ceramic pressure sensor

    Sensors and Actuators, A: Physical, Vol. 60, Núm. 1-3, pp. 72-75

1995

  1. Characterization of tantalum oxynitride thin films as high-temperature strain gauges

    "Sensors and Actuators, A: Physical", Vol. 46, Núm. 1-3, pp. 218-221

1994

  1. Ceramic pressure sensor based on tantalum thin film

    Sensors and Actuators: A. Physical, Vol. 42, Núm. 1-3, pp. 435-438