Laser interference lithography for nanoscale structuring of materials: From laboratory to industry

  1. Rodriguez, A.
  2. Echeverría, M.
  3. Ellman, M.
  4. Perez, N.
  5. Verevkin, Y.K.
  6. Peng, C.S.
  7. Berthou, T.
  8. Wang, Z.
  9. Ayerdi, I.
  10. Savall, J.
  11. Olaizola, S.M.
Journal:
Microelectronic Engineering

ISSN: 0167-9317

Year of publication: 2009

Volume: 86

Issue: 4-6

Pages: 937-940

Type: Article

DOI: 10.1016/J.MEE.2008.12.043 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus