Laser interference lithography for nanoscale structuring of materials: From laboratory to industry

  1. Rodriguez, A.
  2. Echeverría, M.
  3. Ellman, M.
  4. Perez, N.
  5. Verevkin, Y.K.
  6. Peng, C.S.
  7. Berthou, T.
  8. Wang, Z.
  9. Ayerdi, I.
  10. Savall, J.
  11. Olaizola, S.M.
Revue:
Microelectronic Engineering

ISSN: 0167-9317

Année de publication: 2009

Volumen: 86

Número: 4-6

Pages: 937-940

Type: Article

DOI: 10.1016/J.MEE.2008.12.043 GOOGLE SCHOLAR
La source de données: Scopus