Characterization of tantalum oxynitride thin films as high-temperature strain gauges

  1. Ayerdi, I.
  2. Castaño, E.
  3. García-Alonso, A.
  4. Gracia, F.J.
Journal:
"Sensors and Actuators, A: Physical"

ISSN: 0924-4247

Year of publication: 1995

Volume: 46

Issue: 1-3

Pages: 218-221

Type: Article

DOI: 10.1016/0924-4247(94)00893-M GOOGLE SCHOLAR
Data source: Scopus