Characterization of tantalum oxynitride thin films as high-temperature strain gauges
- Ayerdi, I.
- Castaño, E.
- García-Alonso, A.
- Gracia, F.J.
ISSN: 0924-4247
Année de publication: 1995
Volumen: 46
Número: 1-3
Pages: 218-221
Type: Article
ISSN: 0924-4247
Année de publication: 1995
Volumen: 46
Número: 1-3
Pages: 218-221
Type: Article