Dislocation generation related to micro-cracks in Si wafers: High temperature in situ study with white beam X-ray topography

  1. Danilewsky, A.
  2. Wittge, J.
  3. Hess, A.
  4. Cröll, A.
  5. Allen, D.
  6. McNally, P.
  7. Vagovič, P.
  8. Cecilia, A.
  9. Li, Z.
  10. Baumbach, T.
  11. Gorostegui-Colinas, E.
  12. Elizalde, M.R.
Revista:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Any de publicació: 2010

Volum: 268

Número: 3-4

Pàgines: 399-402

Tipus: Article

DOI: 10.1016/J.NIMB.2009.09.013 GOOGLE SCHOLAR
Font de les dades: Scopus