Dislocation generation related to micro-cracks in Si wafers: High temperature in situ study with white beam X-ray topography

  1. Danilewsky, A.
  2. Wittge, J.
  3. Hess, A.
  4. Cröll, A.
  5. Allen, D.
  6. McNally, P.
  7. Vagovič, P.
  8. Cecilia, A.
  9. Li, Z.
  10. Baumbach, T.
  11. Gorostegui-Colinas, E.
  12. Elizalde, M.R.
Aldizkaria:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Argitalpen urtea: 2010

Alea: 268

Zenbakia: 3-4

Orrialdeak: 399-402

Mota: Artikulua

DOI: 10.1016/J.NIMB.2009.09.013 GOOGLE SCHOLAR