Dislocation generation related to micro-cracks in Si wafers: High temperature in situ study with white beam X-ray topography

  1. Danilewsky, A.
  2. Wittge, J.
  3. Hess, A.
  4. Cröll, A.
  5. Allen, D.
  6. McNally, P.
  7. Vagovič, P.
  8. Cecilia, A.
  9. Li, Z.
  10. Baumbach, T.
  11. Gorostegui-Colinas, E.
  12. Elizalde, M.R.
Journal:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Year of publication: 2010

Volume: 268

Issue: 3-4

Pages: 399-402

Type: Article

DOI: 10.1016/J.NIMB.2009.09.013 GOOGLE SCHOLAR
Data source: Scopus