Dislocation generation related to micro-cracks in Si wafers: High temperature in situ study with white beam X-ray topography

  1. Danilewsky, A.
  2. Wittge, J.
  3. Hess, A.
  4. Cröll, A.
  5. Allen, D.
  6. McNally, P.
  7. Vagovič, P.
  8. Cecilia, A.
  9. Li, Z.
  10. Baumbach, T.
  11. Gorostegui-Colinas, E.
  12. Elizalde, M.R.
Revista:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Ano de publicación: 2010

Volume: 268

Número: 3-4

Páxinas: 399-402

Tipo: Artigo

DOI: 10.1016/J.NIMB.2009.09.013 GOOGLE SCHOLAR
Fonte de datos: Scopus