Dislocation generation related to micro-cracks in Si wafers: High temperature in situ study with white beam X-ray topography

  1. Danilewsky, A.
  2. Wittge, J.
  3. Hess, A.
  4. Cröll, A.
  5. Allen, D.
  6. McNally, P.
  7. Vagovič, P.
  8. Cecilia, A.
  9. Li, Z.
  10. Baumbach, T.
  11. Gorostegui-Colinas, E.
  12. Elizalde, M.R.
Revue:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Année de publication: 2010

Volumen: 268

Número: 3-4

Pages: 399-402

Type: Article

DOI: 10.1016/J.NIMB.2009.09.013 GOOGLE SCHOLAR
La source de données: Scopus