In situ observations of dc and ac electromigration in passivated Al lines

  1. Castaño, E.
  2. Maiz, J.
  3. Flinn, P.
  4. Madden, M.
Revue:
Applied Physics Letters

ISSN: 0003-6951

Année de publication: 1991

Volumen: 59

Número: 1

Pages: 129-131

Type: Article

DOI: 10.1063/1.105551 GOOGLE SCHOLAR lock_openAccès ouvert editor