Publicaciones en colaboración con investigadores/as de University of Tampere (7)

2010

  1. Laser interference lithography

    Advances in Nanotechnology. Volume 4 (Nova Science Publishers, Inc.), pp. 179-204

2009

  1. High-power laser interference lithography process on photoresist: Effect of laser fluence and polarisation

    Applied Surface Science, Vol. 255, Núm. 10, pp. 5537-5541

  2. Interference lithography processes with high-power laser pulses

    Proceedings of SPIE - The International Society for Optical Engineering

  3. Laser interference lithography for nanoscale structuring of materials: From laboratory to industry

    Microelectronic Engineering, Vol. 86, Núm. 4-6, pp. 937-940

2007

  1. Current developments and applications using multi-beam laser interference lithography for nanoscale structuring of materials

    Proceedings of SPIE - The International Society for Optical Engineering

  2. Formation of 4-beam laser interference patterns for nanolithography

    Proceedings of SPIE - The International Society for Optical Engineering

  3. System requirement analysis of laser interference nanolithography

    Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007