Enrique
Castaño Carmona
Forscher bis um 2024
Andrés
García-Alonso Montoya
Publikationen, an denen er mitarbeitet Andrés García-Alonso Montoya (11)
1997
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A design tool for pressure microsensors based on FEM simulations
Sensors and Actuators, A: Physical, Vol. 62, Núm. 1-3, pp. 591-594
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A micromachined pressure sensor for biomedical applications
Journal of Micromechanics and Microengineering, Vol. 7, Núm. 3, pp. 244-246
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High-temperature ceramic pressure sensor
Sensors and Actuators, A: Physical, Vol. 60, Núm. 1-3, pp. 72-75
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Metallic thin-film thermocouple for thermoelectric microgenerators
Sensors and Actuators, A: Physical, Vol. 60, Núm. 1-3, pp. 65-67
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Optimization of a three-electrode electrochemical etch-stop process
Sensors and Actuators, A: Physical, Vol. 62, Núm. 1-3, pp. 668-671
1995
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Characterization of tantalum oxynitride thin films as high-temperature strain gauges
"Sensors and Actuators, A: Physical", Vol. 46, Núm. 1-3, pp. 218-221
1994
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Ceramic pressure sensor based on tantalum thin film
Sensors and Actuators: A. Physical, Vol. 42, Núm. 1-3, pp. 435-438
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Thin film technology applied to the development of a multilayer pressure sensor device
Vacuum, Vol. 45, Núm. 10-11, pp. 1103-1105
1993
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An optimized preparation process of stainless-steel substrates and their application to thin-film high pressure sensors
Sensors and Actuators: A. Physical, Vol. 37-38, Núm. C, pp. 703-707
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Mechanical and electrical properties Of SiO2 thin films r.f. sputtered on non-silicon substrates for mechanical sensors
Sensors and Actuators: A. Physical, Vol. 37-38, Núm. C, pp. 57-60
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Strain sensitivity and temperature influence on sputtered thin films for piezoresistive sensors
Sensors and Actuators: A. Physical, Vol. 37-38, Núm. C, pp. 784-789