Asociación Centro Tecnológico Ceit (CEIT)
Centro / Instituto vinculado a la Universidad de Navarra
University of Tampere
Tampere, FinlandiaPublicaciones en colaboración con investigadores/as de University of Tampere (12)
2011
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Two-dimensional periodic nanoscale patterning of solid surfaces by four-beam standing wave excimer laser lithography
Laser Beams: Theory, Properties and Applications (Nova Science Publishers, Inc.), pp. 159-204
2010
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Laser interference lithography
Advances in Nanotechnology. Volume 4 (Nova Science Publishers, Inc.), pp. 179-204
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Sub-20 nm island self-organisation stimulated by spatially periodic laser exposure in the GaAs/InGaAs/GaAs epitaxial system
Quantum Electronics, Vol. 40, Núm. 1, pp. 73-76
2009
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Fabricate planar photonic crystal gradient index lens by laser interference lithography
2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009
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High-power laser interference lithography process on photoresist: Effect of laser fluence and polarisation
Applied Surface Science, Vol. 255, Núm. 10, pp. 5537-5541
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Interference lithography processes with high-power laser pulses
Proceedings of SPIE - The International Society for Optical Engineering
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Laser interference lithography for nanoscale structuring of materials: From laboratory to industry
Microelectronic Engineering, Vol. 86, Núm. 4-6, pp. 937-940
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Ordered nanostructures written directly by laser interference
Nanotechnology, Vol. 20, Núm. 12
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Quality inspection of nanoscale patterns produced by laser interference lithography using image analysis techniques
2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009
2007
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Current developments and applications using multi-beam laser interference lithography for nanoscale structuring of materials
Proceedings of SPIE - The International Society for Optical Engineering
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Formation of 4-beam laser interference patterns for nanolithography
Proceedings of SPIE - The International Society for Optical Engineering
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System requirement analysis of laser interference nanolithography
Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007